Hitachi S4700: Spansion, Sunnyvale, California, USA Improved resolution was observed, on a 5 year old instrument so that sputtered PT grains could be imaged at 5kV and < 3 nm resolution. The user says that the Evactron De-Contaminator is the only accessory one can buy for the SEM that will improve the performance of the instrument.
Hitachi S-4700: NIST Gaithersburg, Maryland, USA NIST borrowed and later purchased an Evactron D-C for controlling contamination in an Hitachi S-4700 SEM. Their research on contamination control resulted in the paper "Active Monitoring and Control of Electron Beam Induced Contamination" Proc. SPIE Vol. 4344 (2001), 835, by András E. Vladár, Michael T. Postek and Ronald Vane. This study found that the Evactron device was "effective in cleaning the vacuum of the specimen chamber of laboratory and production metrology SEMs."
Hitachi S-4700: Oak Ridge National Laboratory, High Temperature Materials Lab, Oak Ridge, Tennessee, USA Roughing pump oil backstreaming through the sample exchange chamber was causing dirty specimens and chamber contamination that could not be controlled with a liquid nitrogen (LN) cold finger. Contamination is controlled by use of both the plasma cleaning and the nitrogen purge features of an automatic Evactron system.
Hitachi S-4700: University of Illinois, Champaign-Urbana, Illinois, USA A three year old Hitachi S-4700 SEM had constant contamination problems since being installed. The user had added a turbomolecular pump and heated micromaze foreline trap, but they made little difference. LN traps, top and bottom, had been kept in service constantly, but failed to stop contamination problems.
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