1. 【序号】: 【作者】:A. Fischer and H. Richter 【题名】:Slip-free processing of 300 mm silicon batch wafers 【期刊】:J. Appl. Phys. 【年、卷、期、起止页码】:J. Appl. Phys. 87, 1543 (2000) 【全文链接】:http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JAPIAU000087000003001543000001&idtype=cvips&gifs=yes
2. 【序号】: 【作者】:K. Jurkschat, S. Senkader, and P. R. Wilshaw 【题名】:Onset of slip in silicon containing oxide precipitates 【期刊】:J. Appl. Phys. 【年、卷、期、起止页码】:J. Appl. Phys. 90, 3219 (2001) 【全文链接】:http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JAPIAU000090000007003219000001&idtype=cvips&gifs=yes