【序号】:1 【作者】:C. L. Chao; J. Neou 【题名】:Model reference adaptive control of air-lubricated capstan drive for precision positioning 【期刊】:Precision Engineering 【年、卷、期、起止页码】:2000, vol.24, no.4 【全文链接】:
【序号】:2 【作者】:T. Fujii, M. Suzuki, M. Miyashita, M. Yamaguchi, T. Onuki, H. Nakamura, and T. Matsubara 【题名】:Micropattern measurement with an atomic force microscope 【期刊】:J.Vac.Sci.Technol.B. 【年、卷、期、起止页码】:1991, vol.9, no.2 【全文链接】:
【序号】:3 【作者】:Fredric E. Scire and E. Clayton Teague 【题名】:Piezodriven 50-µm range stage with subnanometer resolution 【期刊】:Rev.Sci Instrum. 【年、卷、期、起止页码】:1978, vol.49, no.12 【全文链接】: