【序号】:1
【作者】:
Blaine Johs【题名】:Regression calibration method for rotating element ellipsometers
【期刊】:
Thin Solid Films【年、卷、期、起止页码】:
Volume 234, Issues 1–2, 25 October 1993, Pages 395–398
【链接】:
http://www.sciencedirect.com/science/article/pii/004060909390293X