【序号】:1
【作者】:Yun-Jiang Rao and David A Jackson
【题名】:Recent progress in fibre optic low-coherence interferometry
【期刊、年、卷、期、起止页码】:Measurement Science and Technology, Volume 7, Number 7
【全文链接】:
http://iopscience.iop.org/article/10.1088/0957-0233/7/7/001【序号】:2
【作者】:Sungmuk Lee; Shi-kay Yao; Michele Nuhn;
【题名】:Alignment Wavelength Optimization For Wafer Stepper Microscope
【期刊、年、卷、期、起止页码】:Proc. SPIE 0633, Optical Microlithography V, (20 August 1986);
【全文链接】:
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0633/1/Alignment-Wavelength-Optimization-For-Wafer-Stepper-Microscope/10.1117/12.963705.short?SSO=1【序号】:3
【作者】:Brenda CantellJosé RamírezWilliam Gadson
【题名】:Optimization of a Wafer Stepper Alignment System Using Robust Desig
【期刊、年、卷、期、起止页码】:Statistical Case Studies for Industrial Process Improvement
【全文链接】:
http://epubs.siam.org/doi/10.1137/1.9780898719765.ch20【序号】:4
【作者】: Stefan Wittekoek et.al
【题名】:Deep-UV wafer stepper with through-the-lens wafer to reticle alignment
【期刊、年、卷、期、起止页码】:Proceedings Volume 1264, Optical/Laser Microlithography III; (1990)
【全文链接】:
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1264/1/Deep-UV-wafer-stepper-with-through-the-lens-wafer-to/10.1117/12.20207.short?SSO=1【序号】:5
【作者】:Debesh Choudhury
【题名】:Teaching the concept of convolution and correlation using Fourier transform
【期刊、年、卷、期、起止页码】:Proceedings Volume 10452, 14th Conference on Education and Training in Optics and Photonics: ETOP 2017; 104520Y (2017);
【全文链接】:
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10452/104520Y/Teaching-the-concept-of-convolution-and-correlation-using-Fourier-transform/10.1117/12.2267976.full