【序号】:1
【作者】:
P J S Pereira, M L Escrivão, M R Teixeira, M J P Maneira and Y Nunes 【题名】:
Analytical model and measurements of the target erosion depth profile of balanced and unbalanced planar magnetron cathodes【期刊、年、卷、期、起止页码】:
Plasma Sources Science and Technology, Volume 23, Number 6【全文链接】:http://iopscience.iop.org/article/10.1088/0963-0252/23/6/065031