【作者】: Xiaoxiang Xia, Haifang Yang, Yimin Sun,Zongli Wang,Li Wang,Zheng Cui,Changzhi Gu
【题名】:Fabrication of terahertz metamaterials using S1813/LOR stack by lift-off
【期刊】: Microelectronic Engineering
【年、卷、期】:Volume 85 , Issue 5-6 (May 2008)
【全文链接】:
http://portal.acm.org/citation.cfm?id=1374857.1375047&coll=GUIDE&dl=GUIDE&CFID=24430166&CFTOKEN=50842206【作者】:Huang, Howard; Lea, Dallas M.; Lichtenberger, Arthur
【题名】:Submicron contact lithography for etching and lift-off applications using an i-line negative-tone photoresist with controllable slope
【期刊】:Advances in Resist Technology and Processing XIV, Regine G. Tarascon-Auriol;
【年、卷、期】: Proc. SPIE Vol. 3049, p. 720-727, 07/1997
【全文链接】:
http://adsabs.harvard.edu/abs/1997SPIE.3049..720H