【1】
【作者】:M. Schvartzman, K. Nguyen, M. Palma, J. Abramson, J. Sable, J. Hone, M. P. Sheetz, and S. J. Wind
【题名】:Fabrication of nanoscale bioarrays for the study of cytoskeletal protein binding interactions using nanoimprint lithography
【期刊】: J. Vac. Sci. Technol. B
【年、卷、期】: Volume 27, Issue 1, pp. 61-65 (January 2009)
【全文链接】:
http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JVTBD9000027000001000061000001&idtype=cvips&gifs=Yes【2】
【作者】: R. Ramos, G. Cunge, O. Joubert, and T. Lill
【题名】: Plasma reactor dry cleaning strategy after TaC, MoN, WSi, W, and WN etching processes
【期刊】: J. Vac. Sci. Technol. B
【年、卷、期】: Volume 27, Issue 1, pp. 113-121 (January 2009)
【全文链接】:
http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTBD9&Volume=27&Issue=1【3】
【作者】: Raghunath Murali
【题名】: Mitigation of microloading effect in nanoimprint mask fabrication
【期刊】: J. Vac. Sci. Technol. B
【年、卷、期】: Volume 27, Issue 1, pp. 167-168 (January 2009)
【全文链接】:
http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTBD9&Volume=27&Issue=1【4】
【作者】: Hyo-Sung Lee, Jung-Sub Wi, Sung-Wook Nam, Hyun-Mi Kim, and Ki-Bum Kim
【题名】:Two-step resist-development process of hydrogen silsesquioxane for high-density electron-beam nanopatterning
【期刊】: J. Vac. Sci. Technol. B
【年、卷、期】: Volume 27, Issue 1, pp. 188-192 (January 2009)
【全文链接】:
http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTBD9&Volume=27&Issue=1【5】
【作者】: Jing Wan, Zhen Shu, Shao-Ren Deng, Shen-Qi Xie, Bing-Rui Lu, Ran Liu, Yifang Chen, and Xin-Ping Qu
【题名】:Duplication of nanoimprint templates by a novel SU-8/SiO2/PMMA trilayer technique
【期刊】: J. Vac. Sci. Technol. B
【年、卷、期】: Volume 27, Issue 1, pp. 19-22 (January 2009)
【全文链接】:
http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTBD9&Volume=27&Issue=1谢谢版主结贴!