原文由 atlas 发表:
详细验收指标如下:
1、Resistivity ≧18 MΩ.cm at 25℃
2、Particles< 0.2um or greater
3、Bacterial< 10 CFU/100ml , as determined by membrane filter after 72Hrs incubated 30 ℃
4、TOC≦30 ppb
5、Dissolved oxygen≦50 ppb
6、Dissolved SiO2≦10 ppb
7、Na≦1 ppb
8、K+≦1 ppb
9、Cu≦1.0 ppb
10、Zn≦1 ppb
11、Fe≦1 ppb
12、Cr≦1 ppb
13、Mn≦1 ppb
14、Cl-≦1 ppb
15、Residue≦10 ppb