主题：【已应助】求國外文獻4篇

【序號】：1
【作者】：D. Monaghan, M. Holik, V. Bellido-Gonzales, J. Bradley
【篇名】： Optimizing Sputter Processes via 3D Magnetic and Plasma Simulation
【期刊】：SVC - 52nd Annual Technical Conference Proceedings      
【全文連接】：http://www.knovel.com/web/portal/browse/display?_EXT_KNOVEL_DISPLAY_bookid=2796
(在Modeling and Control 的第2篇)

【序號】：2
【作者】：Siemers, M.; Pflug, A.; Szyszka, B.
【篇名】：Particle-in-cell Monte Carlo analysis of propagating plasma waves in DC magnetron discharges
【期刊】：SVC - 52nd Annual Technical Conference Proceedings      
【全文連接】：http://www.knovel.com/web/portal/browse/display?_EXT_KNOVEL_DISPLAY_bookid=2796
(在Process Modeling and Control 的第3篇)

【序號】：3
【作者】：Siemers, M.; Pflug, A.; Szyszka, B.
【篇名】：Particle-in-cell Monte Carlo analysis of anomalous target erosion in magnetron sputtering
【期刊】：SVC - 51st Annual Technical Conference Proceedings
【全文連接】：http://www.knovel.com/web/portal/browse/display?_EXT_KNOVEL_DISPLAY_bookid=2190
(在Process Modeling & Control 的第9篇)

【序號】：4
【作者】：Siemers, M.; Pflug, A.; Szyszka, B.
【篇名】：Three dimensional plasma simulations with a parallelized particle-in-cell Monte Carlo approach
【期刊】：SVC - 49th Annual Technical Conference Proceedings
【全文連接】：http://www.knovel.com/web/portal/browse/display?_EXT_KNOVEL_DISPLAY_bookid=1471
(在Large Area Coating 的第13篇)