【序号】: 1
【作者】: J. Vlcek, B. Zustin, J. Rezek, K. Burcalova, and J. Tesar
【题名】: Pulsed magnetron sputtering of metallic films using a hot target
【期刊、年、卷、期、起止页码】: 52nd Annual Technical Conf. Proc., Society of Vacuum Coaters, Santa Clara, CA, SVC (2009).
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