【序号】:1
【作者】:
D. Depla, ,
G. Buyle,
J. Haemers,
R. De Gryse【题名】:
Discharge voltage measurements during magnetron sputtering【期刊】:
Surface and Coatings Technology【年、卷、期、起止页码】:
Volume 200, Issues 14–15, 10 April 2006, Pages 4329–4338【全文链接】:www.sciencedirect.com/science/article/pii/S0257897205003634