【序号】:1
【作者】:Tommi Tynell, Hisao Yamauchi and Maarit Karppinen
【题名】:Hybrid inorganic–organic superlattice structures with atomic layer deposition/molecular layer deposition
【期刊】:J. Vac. Sci. Technol. A
【年、卷、期、起止页码】:2014,32,01A105
【全文链接】:http://scitation.aip.org/content/avs/journal/jvsta/32/1/10.1116/1.4831751