【作者】 Kim, Sang Kyu; Cho, Hyunmin; Park, Hyun Kyu; Kim, Joong Hyun; Chung, Bong Hyun 【文章标题】Fabrication of Nanochannels by Anisotropic Wet Etching on Silicon-on-Insulator Wafers and Their Appl 【期刊名,年份,卷(期),起止页码】 Journal of Nanoscience and Nanotechnology, Volume 10, Number 1, January 2010, pp. 637-642(6) 【DOI】http://dx.doi.org/10.1166/jnn.2010.1740 【全文链接】http://chinesesites.library.ingentaconnect.com/content/asp/jnn/2010/00000010/00000001/art00099?