主题：【分享】原子力显微镜技术资料(SPM/AFM)

原子力显微镜技术资料主要特点
- 完全机动化的AFM，提供自动的laser-to-tip alignment以及快速启动。 
- 低噪音光学记录系统。
- 真正意义上的非接触式扫描。
- 高速大范围100x100x15um 扫描器
- 先进的闭环控制                                               
- 数字模块化控制器
Measuring modes
●Contact AFM;
●Semicontact AFM;
●True Non-contact AFM;
●LFM;
原子力显微镜技术原子力显微镜技术原子力显微镜技术
●Conductive AFM:
●Advanced MFM, Kelvin Probe,
●Capacitance and EFM;
●Advanced nanolithography and nanomanipulation capabilities;
●STM;
●Tuning fork AFM;
●3D scanning imaging.
技术参数
◆ Scanning range: 100um x 100um x 15um (+/-10%)
◆Scanning type: by sample
◆XY non-linearity: 0.03%
◆Z non-linearity: 0.1%
◆Noise: 0.1nm RMS in XY dimension in 200Hz bandwidth with capacitance sensors on;
            0.02nm RMS in XY dimension in 100Hz bandwidth with capacitancel sensors off;
          l <0.04nm RMS Z capacitance sensor in 1000Hz bandwidth
◆Digital closed loop control: for X,Y,Z axes
◆XY resonance frequency: 7 kHz (unloaded)
◆Z resonance frequency: 15 kHz (unloaded)
◆Active elimination of XY phase lag,
overshooting andl ringing results in fast scanning without any dynamic image distortion
◆Digital filtering of Z control signal at scanner resonant frequencies results in extremely short settling time
◆ Motorized sample positioning: range - 5x5mm, positioning resolution - 1um.

原子力显微镜技术
原子力显微镜技术