http://zygo.com/?sup=/resource/manuals.cgi?type=zmi 产品资料非完全开放，需要你自己写电邮联系： 原文： "A User Name and Password are required to download manuals. If you are an existing ZYGO customer, you may request that this information be e-mail to you. If you would like to download a manual prior to purchasing a ZYGO product, your local Sales/Service Office will be happy to assist you. "
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