【序号】: 1 【作者】: B. Saha, E. Liu, S.B. Tor, D.E. Hardt, J.H. Chun, N W Khun 【题名】: Improvement in lifetime and replication quality of Si micromold using N:DLC:Ni coatings for microfluidic devices 【期刊】: Sensors and Actuators B: Chemical 【年、卷、期、起止页码】: in press 【全文链接】: http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6THH-50J9GWB-5&_user=10&_coverDate=07%2F16%2F2010&_alid=1404340217&_rdoc=3&_fmt=high&_orig=search&_cdi=5283&_sort=d&_docanchor=&view=c&_ct=236&_acct=C000050221&_version=1&_urlVersion=0&_userid=10&md5=bce81303a6a298c0c33d1936db82530a