【序号】:1 【作者】:A.K. Mishra 【题名】:Magnetic Field Effect on Pre-Sheath Dynamics in a High Power Impulse Magnetron Sputtering (HiPIMS) Discharge 【期刊】:SVC - 53rd Annual Technical Conference Proceedings 【年、卷、期、起止页码】: 2010 ,section:High Power Impulse Magnetron Sputtering (HIPIMS) 【全文链接】:http://www.knovel.com/web/portal/browse/display?_EXT_KNOVEL_DISPLAY_bookid=3458