【序号】:1
【作者】:Ataman, C.; Lani, S.; Noell, W.; Jutzi, F.; Bayat, D.; de Rooij, N.
【题名】:A dual-axis high fill-factor micromirror array for high thermal loads
【期刊】:
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on【年、卷、期、起止页码】:2011 , Page(s): 135 - 136
【链接】:
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&arnumber=6031063&contentType=Conference+Publications