【序号】:1
【作者】:J. Garnaes, P.-E. Hansen, N. Agersnap, J. Holm, F. Borsetto, and A. Kühle
【题名】:Profiles of a high-aspect-ratio grating determined by spectroscopic scatterometry and atomic-force microscopy
【期刊】:Applied Optics,
【年、卷、期、起止页码】:Vol. 45, Issue 14, pp. 3201-3212 (2006)
【全文链接】:
http://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-45-14-3201【序号】:2
【作者】:Kamal Belkebir and Anne Sentenac
【题名】:High-resolution optical diffraction microscopy
【期刊】:J. OSA A
【年、卷、期、起止页码】:Vol. 20, Issue 7, pp. 1223-1229 (2003)
【全文链接】:
http://www.opticsinfobase.org/josaa/abstract.cfm?uri=josaa-20-7-1223