主题：【原创】白光干涉显微镜的Z轴分辨率

请教:白光干涉显微镜(3D轮廓仪)的Z轴分辨率有这么高吗?0.01nm!是如何达到的?如下是英国TAYLOR HOBSON的一款产品简介,不知什么原因图片没有贴上.

Talysurf CCI 3000A

For applications requiring the ultimate in high precision 3D profile analysis, Talysurf 3000A brings an unparalleled level of performance with specifications never seen before.

△ 0.01 nm resolution          △0.003 nm  Rq repeatability
△ 100μm vertical range        △ 0.3 – 100% reflectivity
△ 1,048,576 data points        △300mm capacity

Talysurf CCI 3000A delivers high accuracy, repeatability and stability by using an advanced type of interferometer and a patented correlation algorithm. This method provides both high resolution and excellent sensitivity to returning light. Measurement set-up is easy: place the component on the stage, set the focus height and push the start button. Cycle time is 10 – 20 seconds. Motorised stages are available to increase throughput and virtually eliminate operator errors.