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1.Dai G., Pohlenz F., Danzebrink H. U., et al. Improving the Performance of Interferometers in Metrological Scanning Probe Microscopes. Measurement Science Technology, 2004
2.TOPCU S., CHASSAGNE L. Heterodyne Interferometric Technique for Displacement Control at the Nanometric Scale. Review of Scientific Instruments, 2003
3.CHASSAGNE L., TOPCU S. Highly Accurate Positioning Control Method for Piezoelectric Actuators Based on Phase Shifting Optoelectronics. Measurement Science and Technology. 2005
4.Eom Tae Bong, Choi Tae Young, Lee KeonHee. A Simple Method for the Compensation of the Nonlinearity in the Heterodyne interferometer. Measurement and Science Technology. 2002
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