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补充连接：
http://www.springer.com/materials/characterization+%26+evaluation/book/978-0-306-47858-1?cm_mmc=Google-_-Book%20Search-_-Springer-_-0

希望大家一起努力，呵呵，如果多人上传我将考虑每人一百，不会让你的努力得不到回报的。

好像版主还有奖励呢！

你要找的这本书好贵哦。

你说的是电子类的书还是电子档的书？

原文由 yanhui_wang88 发表:
你说的是电子类的书还是电子档的书？

是你说的电子档的书，请帮忙啊！

别沉底啊
请求版主给置顶

呵呵，还是请大家快点动手啊！拜托了

没有人回帖也没有人来拿这500积分，索性就请版主把帖子从置顶中撤下来吧！

CHAPTER 1. Alternative  Lithography.................            1
              C. M. Sotomayor Torres
    1.1  Introduction    ....................................  1
    1.2  Moulding polymers in the nanometer scale.....              2
    1.3  Microcontact printing ...................        8
    1.4  Scanning probe aproaches............            9
    1.5  Applications..............................10
    1.6  Recent nanofabrication experiments ...........          10
    1.7  Status and perspectives ........................ 11
CHAPTER 2. Nanoimprint Lithography ...............................................15
              Stephen Y. Chou
    2.1  Introduction    .................................  15
    2.2  Nanoimprint lithography (NIL) Principle and process........ 15
    2.3  Resolution...................            16
    2.4  3-D patterning ....................... 17
    2.5  Imprint over non-flat surfaces.....................18
    2.6  Uniformity and submicron alignment over 4 inch wafers ... 19
    2.7  Different imprint machines .......................20
    2.8  Applications    ................................. 21
    2.9  Summary and future ..................... 22
CHAPTER 3. Viscoelastic Properties of Polymers ..............25
          Thomas Hoffmann
    3.1  Introduction ..............................25
    3.2  Squeezing flow of a Newtonian liquid in HEL........... 28
    3.3  Viscoelastic properties of polymers ......  37
CHAPTER 4. Nanorheology.......................      47
              Helmut Schift and Laura J. Heyderman
    4.1  Introduction    ..............................  47
    4.2  Basics of thin filmrheology ................ 50
    4.3  Hot embossing in practice .............. 61
    4.4  Looking ahead ..................72
CHAPTER 5. Wafer Scale Nanoimprint Lithography ............... 77
              Lars Montelius and Babak Heidari
    5.1  Introduction .............. 77
    5.2  Special requirements for large wafer scale NIL........ 79
    5.3  Fabrication of a nanoimprint lithography system......... 80
    5.4  Nil Equipment design.................. 87
    5.5  Imprint processing........................ 90
    5.6  Discussion and conclusions ................... 96
CHAPTER 6. Step And Stamp Imprint Lithography ...............103
              Jouni Ahopelto and Tomi Haatainen
    6.1  Introduction ..............................103
    6.2  Step and stamp imprinting lithography................. 105
    6.3  Pattern transfer using step and stamp imprint lithography..107
    6.4  Mix and match with UV lithography.............109
    6.5  Pattern reproduction .................111
    6.6  Conclusions    ...........................113
CHAPTER 7. Step and Flash Imprint Lithography ...............117
              TC. Bailey, M. Colburn, B.J. Choi, A. Grot, J.G. Ekerdt,
              S.V Sreenivasan, C.G. Willson
    7.1  Introduction      .................. 117
    7.2  Process overview..............................118
    7.3  Template fabrication............................119
    7.4  Surface treatment .................................. 120
    7.5  Etch barrier  ...................................... 122
    7.6  Reliability  .................................... 130
    7.7  Patterning results.....................132

CHAPTER 8. Using PDMS as a thermocurable resist for a mold assisted imprint process ....139
              L Malaquin and C. Vieu
    8.1  Introduction    ............................    139
    8.2  PDMS material ......................................140
    8.3  Technological implementation........................144
    8.4  Results  ............................. .......... 151
    8.5  Conclusions and domains of application...............162
CHAPTER 9. Molecules for Microcontact Printing ................ 167
              Jurriaan Huskens, Maik Liebau and David N. Reinhoudt
    9.1  Introduction      ................................ 167
    9.2  Quality of printed SAMs ........................... 168
    9.3  Microcontact printing of etch resists.................. 171
    9.4  Printing functional adsorbates .........................173
    9.5  Printing on other substrates .......................... 174
    9.6  Microcontact printing in bio-applications ................176
    9.7  Conclusions ..................................177
CHAPTER 10. Microcontact Printing Techniques...............181
              Massimo Tormen
    10.1  Introduction      ................................181
    10.2  The self-assembly of alkanethiols .............. 183
    10.3  The stamp      ..................................... 185
    10.4  Properties of poly(dimethyl siloxane) elastomers .......185
    10.5  Stamps for microcontact printing............... 190
    10.6  Stamp fabrication        .........................192
    10.7  The microcontact printing process.........1............193
    10.8  Substrates for microcontact printing...........194
    10.9  Printing conditions....................1............196
    10.10 Chemical etching        .....................197
    10.11 Microcontact printing using ultrathin stamps ...........198
    10.12 A multilevel process: Mix and Match with accurate alignment
          of the CP  .............206

CHAPTER 11. Local Oxidation Nanolithography .......... 213
              Ricardo Garcia
    11.1  Introduction..............................213
    11.2  Local oxidation modes......................214
    11.3  Liquid meniscus........................217
    11.4  Kinetics.........................219
    11.5  Mechanism  ......... ..................221
    11.6  Substrates .....................................222
    11.7  Resolution.....................223
    11.8  Applications .....................................224

CHAPTER 12. Combined Approaches for Nanoelectronic Device Fabrication ........235
              I. Martini, M. Kamp and A. Forchel
    12.1  Introduction............................235
    12.2  Fabrication of nanoelectronic devices ............236
    12.3  Mold fabrication .....................237

    12.4  Alignment  .................................239
    12.5  Alternative polymers  ...................244
    12.6  Characterization  ........................ 246
CHAPTER 13. Application of Nanoimprint Lithography in Magnetism .... 249
              Y. Chen, M. Natali, S.P. Li and A. Lebib
    13.1  Introduction ............................249
    13.2  Physics of patterned magnetic structures ............250
    13.3  Nanoimprint lithography parameters .................255
    13.4  Patterned magnetic nanostructures ..................262
    13.5  Conclusion ...............................268
CHAPTER 14. Application of Microcontact Printing and Nanoimprint Lithography .......... . 271
              Georg Schmidt, Tatjana Borzenko, Massimo Tormen, Volkmar Hock, Laurens W. Molenkamp
    14.1  Introduction ................... 271
    14.2  Process  ......................273
    14.3  Nanoimprinting of point contacts .......................278
CHAPTER 15. Optical Applications of Nanoimprint Lithography ......287
              J. Seekamp
    15.1  Introduction .................    287
    15.2  Candidates for and examples of printed optical devices .. 288
    15.3  Nanoimprint lithography of photonic devices .........290
    15.4  Outlook and conclusion ................ 295


CHAPTER 16. Biotechnology Applications of NIL ........... 297
              Lars Montelius and Babak Heidari
    16.1  Introduction .......................... 297
    16.2  Introduction to NIL .........................297
    16.3  Biotechnical application areas for NIL ...............298
    16.4  Examples ......................................299
CHAPTER 17. Soft Lithography and Imprint-Based Techniques for
              Microfluidics and Biological Analysis .............305
            Anne Pdpin and Yong Chen
    17.1  Introduction..................305
    17.2  Soft lithography  .............. ............... 309
    17.3  Imprint-based  techniques  .........................315
    17.4  Conclusions and perspectives .........................325

Index                                                                  331