纳米压痕仪 该仪器可广泛的应用于材料、薄膜、化工、石油、岩石、微电子、微型传感器、半导体材料、自动控制、航空航天、汽车工业及机械工具的材料研究和开发还可以应用于工业产品的失效与可靠性的评价、质量控制及检验;也可以按所有的ASTM 和多种ISO 的标准进行测量。同时也可以向各类不同领域中的用户提供检测服务。 技术参数 Scratch tools: Rockwell and Vickers indenters Dimond stylus, 2-200um Tungsten carbide, sapphire, steel balls, 1-1.5mm Steel needles, 0.1-1mm Patented micro-blade, 0.4-1.0mm Maximum normal load: 200N Normal load minimum resolution: 1uN Multiple sensors: Acoustic emission: high-frequency up to 5.5MHz Friction coefficient Electrical contact or surface resistance: mOhms-MOhms Capacitance for depth monitoing Digital optical microscope for micro-imaging: 550X CCD Camera: video and still images Atomic force microscope for nano-imaging: Sample shapes: any, including irregular Sample sizes: from microns up to 150mm Sample stages: linear or rotary, Position resolution<1um Multi-scratch: automatic mode 主要特点 SCRATCH-RESISTANCE SCRATCH-ADHESION SCRATCH-HARDNESS SCRATCH-TOUGHNESS The technique involves generating a controlled scratch with a scratching tip under a precisely controlled progressive load. At a certain critical load the coating starts to fail. The critical loads are detected precisely with multiple sensors and then are used to quantify the adhesive properties of film-substrate combinations. 纳米压痕仪