【序号】: 【作者】:G Gould, EA Irene 【题名】:The Influence of Silicon Surface Cleaning Procedures on Silicon Oxidation 【期刊】: Journal of the Electrochemical Society 【年、卷、期、起止页码】: 1987,哦路么134,苏俄4,.1031-1033 【全文链接】:http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JESOAN000134000004001031000001&idtype=cvips&gifs=yes