Title: Microfabrication of PPy microactuators and other conjugated polymer devices
Authors: Smela, Elisabeth
Author affiliation: Riso Natl Lab, Roskilde, Den
Serial title: Journal of Micromechanics and Microengineering
Abbreviated serial title: J Micromech Microengineering
Volume: v 9
Issue: n 1
Issue date: Mar
Publication year: 1999
Pages: p 1-18
Language: English
ISSN: 0960-1317
CODEN: JMMIEZ
Document type: Journal article (JA)
Publisher: IOP, Bristol, Engl
Abstract: Conjugated polymers have a number of interesting properties that can be exploited in microfabricated sensors and actuators. For example, polypyrrole is a conjugated polymer that can change volume to deliver significant stresses and strains. These materials can be patterned using conventional microfabrication techniques. The procedures for doing this are described in this paper, focusing on the microfabrication of polypyrrole microactuators. In addition, other methods for the deposition and patterning of conjugated polymers are reviewed. A special technique for releasing actuators, differential adhesion, is also detailed.
Abstract type: (Author abstract)
Number of references: 179
Ei main heading: Microactuators
Ei controlled terms: Polypyrroles - Molecular structure - Deposition - Adhesion - Microelectromechanical devices - Energy gap
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