原文由 jinruchen 发表:
Because the heater were 3mm long. They often stuck to the surface after the release. This was due to capillary forces from the rinse the release. To alleviate this problem, a DI water/ IPA/ DI wafer / IPA rinse was incorporated followed by a 200℃ bake on a hot plate to suspend the structures.
因为加热器3mm长,它们时常固定在释放 后的表面上,这个释放是用毛细管人工冲洗转移出的。为了减轻难度用去离子水/异丙醇/去离子水晶片/异丙醇冲洗,在一个热的阳极盘上烘。