nano beam diffraction 或者 microdiffraction, 不过做起来挺麻烦的。特别是晶粒比较小靠的又比较近。
这里有篇不是完全研究取向的:
STEM nanodiffraction technique for structural analysis of CoPt nanoparticles
Ultramicroscopy, Volume 108, Issue 7, June 2008, Pages 656-662
D. Alloyeau, C. Ricolleau, T. Oikawa, C. Langlois, Y. Le Bouar, A. Loiseau