1. Precise motion control of a nanopositioning PZT microstage using integrated capacitive displacement sensors H G Xu, T Ono and M Esashi Graduate School of Engineering, Tohoku University, 6-6-01 Aramaki-Aza-Aoba, Aoba-ku, Sendai 980-8579, Japan 2. Nanomeasurement- and nanopositioning method Author(s): Jager G Source: TM-TECHNISCHES MESSEN Volume: 73 Issue: 9 Pages: 455-456 Published: SEP 2006 3. Nanopositioning - methods and means Author(s): Lendraitis V, Mizariene V, Seniunas G Source: MECHANIKA Issue: 2 Pages: 49-55 Published: 2007