【序号】:1
【作者】:
Hauge, P. S.【题名】:Design and Operation of ETA, an Automated Ellipsometer
【期刊】:
IBM Journal of Research and Development【年、卷、期、起止页码】: Nov. 1973,17
, Issue: 6 Page(s): 472 - 489
【链接】:
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=5391322