原文由 timstoICPMS(timstoICPMS) 发表:
原文由 shoen0739(shoen0739) 发表:
ICP-MS仪器不用时,一般是待机状态,此时开着氩气
为什么要开着 氩气源?没任何意义
工程师安装时让我们一直开着氩气。除非换气的时候。
是否防止意外断电,仪器泄真空时,空气进入真空腔? 他们说这个机器 完全关机的过程中也要求开着氩气。
否则空气进入,下次再开机抽真空会时间较多。
原文如下:
Shutdown
1.
Ensure that the system is connected to the argon supply (the vacuum chamber will be
filled with argon when vented).2. Press Vacuum Off button on the side panel (on the left side of the instrument below the
circuit breakers).
3. Wait for 10 minutes. (Initially the turbo-pumps will be heard to be slowing down
gradually. T
hen the venting valve will open and the chamber will be filled up with argon
through the purge valve slowly at controlled pressure).4. After the turbo-pumps have slowed down, the power can be shut off. At this point, the
reading on the vacuum gauge controller VGC402 will be in ~ Torr range, as opposed to
the <1E-6 Torr operational pressure and ~ 1E-6 - 1e-4M Torr when the turbo-pumps are
slowing down but the venting valve is not yet open. It will open after turbo-pumps are
slowed down completely.
5. Let flush with argon for 10 minutes.
6. Switch OFF the circuit breakers in this sequence AC Outlets, Backing Pump, RF
Generator and System.
7.
Leave argon supply ON (if one wants to save on argon and can compromise on time
taken for vacuum to build up, you can turn the argon supply OFF).